508 Каталог MAHR 2014 Измерительные инструменты и приборы для линейно-угловых измерений Стр.15-47

Каталог MAHR 2014 Измерительные инструменты и приборы Стр. 15-47 0508 ENG Lab2u

MarSurf Surface Measuring Instruments and Systems 15-47 Mahr MarSurf CWM 100 Description The high-precision computer-controlled optical measuring instrument MarSurf CWM 100 with subnanometer resolution. A combined 3D measurement system consisting of a confocal microscope and white light interferometer. Universal suitability for technical optical and reflective surfaces and surfaces of printed circuit boards and semiconductors and biological tissues 2D surface analysis and measuring evaluation Topographic 3D surface analysis and measuring value evaluation Fast measurements short measuring times Microscopic image field dimensions easily extendable with fully automatic stitching process Automatic table and object positioning 100 mm x 100 mm longer distance upon request Large selection of objectives enables ideal adaptation to the measuring object Solid construction with granite base plate and granite column for best vibration damping Professional evaluation software based on MountainsMap Delivery scope Sensor system consisting of - Confocal microscope KFM with 6x objective turret - Camera 768 pixel x 582 pixel up to 48 images s - CNC-controlled Z-axis with integrated Heidenhain glass scale - WLI software module software "Inspector" Granite base and column with sensor system and CNC-controlled object table Motorized mutli-axis control for Z-axis and XZ table for sample positioning and image field merging Objective 50x0.8 EPI (confocal microscope) Objective 20x0.4 DI (white light interferometer) Accessories Tilting table CT 120 biaxial Angle adjustment table + -30 Set of standards Confocal microscope KFM objectives 10x0.5; 20x0.75; 50x0.6 with 11 mm wd; 50x0.8; 100x0.9 White light interferometer WLI objectives 2.5x0.075; 5x0.13; 10x0.3; 20x0.4; 50x0.55; 100x0.7 Technical Data Applications Mechanical engineering Metallic surfaces of all types (ground rolled etc.) also laser-textured surfaces ceramic and plastic surfaces surfaces of molds Medical industry Metallic ceramic and plastic surfaces of implants prostheses and instruments Electronics industry Surface analysis of coatings measurement and analysis of electronic and semiconductor components Optics industry Form and roughness analysis of diverse optical components (all materials). Measuring principle Measuring range Interferometric white light-interfero-metric and confocal light source (KFM and WLI) high-performance-LED 505 nm Sensor unit movable 100 mm in Z CNC-controllable object table movable 100 mm in X and Y CNC-controllable Interferometer white light-interfero- meter light source (WLI) up to 4 mm (depending upon lens) Confocal microscope Measuring range (KFM) up to over 800 m (depending upon resolution in Z and lens)